Combined Colorimetric and Gravimetric CMUT Sensor for Detection of Phenylacetone

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedings – Annual report year: 2017Researchpeer-review



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The detection of phenylacetone is of interest as it is a common precursor for the synthesis of (meth)amphetamine. Resonant gravimetric sensors can be used to detect the mass and hereby the concentration of a gas while colorimetric arrays typically have an exceptional selectivity to the target analyte if the right colorimetric dyes are chosen. We present a sensor system consisting of a Capacitive Micromachined Ultrasonic Transducer (CMUT) and a colorimetric array for detection of phenylacetone. The CMUT is used as a resonant gravimetric gas sensor where the resonance frequency shift due to mass loading of the plate. A single Local Oxidation of Silicon (LOCOS) step was used to define the cavities which were sealed with a Si3N4 plate with a thickness of 100nm, resulting in a resonance frequency of 38:8MHz and a theoretical mass sensitivity of 28:3 zg/Hz·μ2. The CMUTs were functionalized with the same dyes used to fabricate colorimetric arrays. While both the CMUTs and the colorimetric arrays showed selectivity to phenylacetone, the best selectivity was achieved by the colorimetric array. Furthermore, the mass of the phenylacetone was found as a function of time. Thus, the combination of the colorimetric array and the CMUT results in a good selectivity and a quantitative value for the mass.
Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium (IUS)
Number of pages4
Publication date2017
ISBN (Electronic)978-1-5386-3383-0
Publication statusPublished - 2017
Event2017 IEEE International Ultrasonics Symposium (IUS) - Omni Shoreham Hotel, Washington, United States
Duration: 6 Sep 20179 Sep 2017


Conference2017 IEEE International Ultrasonics Symposium (IUS)
LocationOmni Shoreham Hotel
CountryUnited States
Internet address
CitationsWeb of Science® Times Cited: No match on DOI

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