TY - JOUR
T1 - Combined AFM and laser lithography on hydrogen-passivated amorphous silicon
AU - Birkelund, Karen
AU - Mullenborn, Matthias
AU - Grey, Hasin Francois D.charnoy
AU - Jensen, Flemming
AU - Madsen, Steen
PY - 1996
Y1 - 1996
N2 - We report a novel combination of AFM lithography and laser direct writing on hydrogen-passivated amorphous silicon surfaces to fabricate combined silicon milli-, micro- and nanostructures. Selective oxidation is performed by focusing a laser beam (λ = 458 nm) on a hydrogen-terminated silicon surface, forming the millimetre-size contact pads for connection of nanometre-scale patterns. The nanostructures are made by electric-field-enhanced oxidation using a contact mode AFM equipped with a metal-coated tip. Both techniques are based on selective oxidation of hydrogen-passivated amorphous silicon, where the oxide is used as an etch mask in a single etch step. The lithographic process has also been demonstrated using a reflection mode scanning near-field optical microscope with an uncoated fiber probe.
AB - We report a novel combination of AFM lithography and laser direct writing on hydrogen-passivated amorphous silicon surfaces to fabricate combined silicon milli-, micro- and nanostructures. Selective oxidation is performed by focusing a laser beam (λ = 458 nm) on a hydrogen-terminated silicon surface, forming the millimetre-size contact pads for connection of nanometre-scale patterns. The nanostructures are made by electric-field-enhanced oxidation using a contact mode AFM equipped with a metal-coated tip. Both techniques are based on selective oxidation of hydrogen-passivated amorphous silicon, where the oxide is used as an etch mask in a single etch step. The lithographic process has also been demonstrated using a reflection mode scanning near-field optical microscope with an uncoated fiber probe.
U2 - 10.1006/spmi.1996.0114
DO - 10.1006/spmi.1996.0114
M3 - Journal article
SN - 0749-6036
VL - 20
SP - 555
EP - 560
JO - Superlattices and Microstructures
JF - Superlattices and Microstructures
IS - 4
ER -