Combined AFM and laser lithography on hydrogen-passivated amorphous silicon

Karen Birkelund, Matthias Mullenborn, Hasin Francois D.charnoy Grey, Flemming Jensen, Steen Madsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSuperlattices and Microstruc.
    Volume20
    Pages (from-to)555-560
    Publication statusPublished - 1996

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