Collimated Magnetron Sputter Deposition for Mirror Coatings

A. Vickery; Carsten P. Cooper-Jensen; Finn Erland Christensen; M.P. Steenstrup; T. Schønfeldt

doi:10.1155/2008/792540

Collimated Magnetron Sputter Deposition for Mirror Coatings

A. Vickery, Carsten P. Cooper-Jensen, Finn Erland Christensen, M.P. Steenstrup, T. Schønfeldt

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.

Original language	English
Journal	X-Ray Optics and Instrumentation
Pages (from-to)	9
ISSN	1687-7632
DOIs	https://doi.org/10.1155/2008/792540
Publication status	Published - 2008

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title = "Collimated Magnetron Sputter Deposition for Mirror Coatings",

abstract = "At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.",

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journal = "X-Ray Optics and Instrumentation",

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T1 - Collimated Magnetron Sputter Deposition for Mirror Coatings

AU - Vickery, A.

AU - Cooper-Jensen, Carsten P.

AU - Christensen, Finn Erland

AU - Steenstrup, M.P.

AU - Schønfeldt, T.

PY - 2008

Y1 - 2008

N2 - At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.

AB - At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.

U2 - 10.1155/2008/792540

DO - 10.1155/2008/792540

M3 - Journal article

SN - 1687-7632

SP - 9

JO - X-Ray Optics and Instrumentation

JF - X-Ray Optics and Instrumentation

ER -

Collimated Magnetron Sputter Deposition for Mirror Coatings

Abstract

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