Fingerprint
Dive into the research topics of 'Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers
Erik Vilain Thomsen, Carsten Christensen, C.R. Andersen, Erik Vesterlund Pedersen, Paul Nicholas Egginton, Ole Hansen, Jon Wulff Petersen
Research output: Contribution to journal › Journal article › Research › peer-review