CMOS integrated nickelelectroplated comb-drive resonators

Arda Deniz Yalcinkaya, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Nordic Semiconductor Meeting Paper 1037
    Publication date2003
    Publication statusPublished - 2003

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