| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Nordic Semiconductor Meeting Paper 1037 |
| Publication date | 2003 |
| Publication status | Published - 2003 |
CMOS integrated nickelelectroplated comb-drive resonators
Arda Deniz Yalcinkaya, Ole Hansen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review