Circular Piezoelectric Accelerometer for High Band Width Application

Christian Carstensen Hindrichsen, Jack Larsen, Rasmus Lou-Møller, K. Hansen, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

1094 Downloads (Pure)

Abstract

An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.
Original languageEnglish
Title of host publicationIEEE Sensors 2009
PublisherIEEE
Publication date2009
ISBN (Print)978-1-4244-4548-6
DOIs
Publication statusPublished - 2009
Event8th IEEE Conference on Sensors - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009

Conference

Conference8th IEEE Conference on Sensors
CountryNew Zealand
CityChristchurch
Period25/10/200928/10/2009

Bibliographical note

Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Cite this

Hindrichsen, C. C., Larsen, J., Lou-Møller, R., Hansen, K., & Thomsen, E. V. (2009). Circular Piezoelectric Accelerometer for High Band Width Application. In IEEE Sensors 2009 IEEE. https://doi.org/10.1109/ICSENS.2009.5398277