An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 Â¿m) is suspended by a 20 Â¿m thick annular silicon membrane (radius = 1800 Â¿m). A 24 Â¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.
|Title of host publication||IEEE Sensors 2009|
|Publication status||Published - 2009|
|Event||8th IEEE Conference on Sensors - Christchurch, New Zealand|
Duration: 25 Oct 2009 → 28 Oct 2009
|Conference||8th IEEE Conference on Sensors|
|Period||25/10/2009 → 28/10/2009|