Circular Piezoelectric Accelerometer for High Band Width Application

Christian Carstensen Hindrichsen, Jack Larsen, Rasmus Lou-Møller, K. Hansen, Erik Vilain Thomsen

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An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.
Original languageEnglish
Title of host publicationIEEE Sensors 2009
Publication date2009
ISBN (Print)978-1-4244-4548-6
Publication statusPublished - 2009
Event8th IEEE Conference on Sensors - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009


Conference8th IEEE Conference on Sensors
Country/TerritoryNew Zealand

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