Characterization system for resonant micro- and nanocantilevers

Rasmus Kousholt Sandberg, Anja Boisen, Winnie Edith Svendsen

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    We present a system for characterization of the resonant properties of micro- and nanocantilever sensors. The system has been constructed as a vacuum chamber with capabilities for controlling environmental conditions such as pressure, temperature, and chemical constituents. Characterization can be achieved either electrically or using a specialized laser-optical detection system. The system has been used to characterize the resonant properties of SiO2 cantilevers as well as other resonant structures. We present experimental results of a SiO2 resonant cantilever, showing an exceptional accuracy in resonant frequency determination, and demonstrating the importance of resonance characterization in a controlled environment. ©2005 American Institute of Physics
    Original languageEnglish
    JournalReview of Scientific Instruments
    Issue number12
    Pages (from-to)125101
    Publication statusPublished - 2005

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    Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.


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