Characterization system for resonant micro- and nanocantilevers

Rasmus Kousholt Sandberg, Anja Boisen, Winnie Edith Svendsen

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    Abstract

    We present a system for characterization of the resonant properties of micro- and nanocantilever sensors. The system has been constructed as a vacuum chamber with capabilities for controlling environmental conditions such as pressure, temperature, and chemical constituents. Characterization can be achieved either electrically or using a specialized laser-optical detection system. The system has been used to characterize the resonant properties of SiO2 cantilevers as well as other resonant structures. We present experimental results of a SiO2 resonant cantilever, showing an exceptional accuracy in resonant frequency determination, and demonstrating the importance of resonance characterization in a controlled environment. ©2005 American Institute of Physics
    Original languageEnglish
    JournalReview of Scientific Instruments
    Volume76
    Issue number12
    Pages (from-to)125101
    ISSN0034-6748
    DOIs
    Publication statusPublished - 2005

    Bibliographical note

    Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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