Characterization of the Microloading Effect in Deep Reactive Ion Etching of Silicon

Søren Jensen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the SPIE International Symposium on Micromachining and Microfabrication
Volume	5342
Publication date	2004
Pages	111-118
Publication status	Published - 2004

OpenUrl availability

@inproceedings{5debea0b831249ec8e5d432cb56ecd3c,

title = "Characterization of the Microloading Effect in Deep Reactive Ion Etching of Silicon",

author = "S{\o}ren Jensen and Ole Hansen",

year = "2004",

language = "English",

volume = "5342",

pages = "111--118",

booktitle = "Proceedings of the SPIE International Symposium on Micromachining and Microfabrication",

}