Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing

Casper Pedersen, Simon Tage Jespersen, K.W. Jacobsen, J.P. Krog, C. Christensen, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors)
Publication date	2003
Pages	418-421
Publication status	Published - 2003

OpenUrl availability

@inproceedings{f3ea048e7ab24136b23fa4ccd29208f4,

title = "Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing",

author = "Casper Pedersen and Jespersen, \{Simon Tage\} and K.W. Jacobsen and J.P. Krog and C. Christensen and Thomsen, \{Erik Vilain\}",

year = "2003",

language = "English",

pages = "418--421",

booktitle = "Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors)",

}

Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing. / Pedersen, Casper; Jespersen, Simon Tage; Jacobsen, K.W. et al.
Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors). 2003. p. 418-421.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing

AU - Pedersen, Casper

AU - Jespersen, Simon Tage

AU - Jacobsen, K.W.

AU - Krog, J.P.

AU - Christensen, C.

AU - Thomsen, Erik Vilain

PY - 2003

Y1 - 2003

M3 - Article in proceedings

SP - 418

EP - 421

BT - Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors)

ER -