Characterization of large area nanostructured surfaces using AFM measurements

Matteo Calaon, Hans Nørgaard Hansen, Guido Tosello, Jørgen Garnæs, Christian Ravn, Peter Torben Tang

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Abstract

A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%. AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.
Original languageEnglish
Title of host publicationProceedings of the 12th euspen International Conference
Number of pages4
PublisherThe European Society for Precision Engineering and Nanotechnology
Publication date2012
Publication statusPublished - 2012
Event12th euspen International Conference - Stockholm, Sweden
Duration: 4 Jun 201212 Jun 2012
http://www.stockholm2012.euspen.eu/

Conference

Conference12th euspen International Conference
CountrySweden
CityStockholm
Period04/06/201212/06/2012
Internet address

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