Characterization of large area nanostructured surfaces using AFM measurements

Matteo Calaon; Hans Nørgaard Hansen; Guido Tosello; Jørgen Garnæs; Christian Ravn; Peter Torben Tang

Characterization of large area nanostructured surfaces using AFM measurements

Matteo Calaon, Hans Nørgaard Hansen, Guido Tosello, Jørgen Garnæs, Christian Ravn, Peter Torben Tang

DFM - Dansk Fundamental Metrologi A/S

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%. AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.

Original language	English
Title of host publication	Proceedings of the 12th euspen International Conference
Number of pages	4
Publisher	The European Society for Precision Engineering and Nanotechnology
Publication date	2012
Publication status	Published - 2012
Event	12th euspen International Conference - Stockholm, Sweden Duration: 4 Jun 2012 → 12 Jun 2012 http://www.stockholm2012.euspen.eu/

Conference

Conference	12th euspen International Conference
Country/Territory	Sweden
City	Stockholm
Period	04/06/2012 → 12/06/2012
Internet address	http://www.stockholm2012.euspen.eu/

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@inproceedings{5c839656e4484a49a99c1272aa24f99b,

title = "Characterization of large area nanostructured surfaces using AFM measurements",

abstract = "A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%. AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.",

author = "Matteo Calaon and Hansen, {Hans N{\o}rgaard} and Guido Tosello and J{\o}rgen Garn{\ae}s and Christian Ravn and Tang, {Peter Torben}",

year = "2012",

language = "English",

booktitle = "Proceedings of the 12th euspen International Conference",

publisher = "The European Society for Precision Engineering and Nanotechnology",

note = "12th euspen International Conference ; Conference date: 04-06-2012 Through 12-06-2012",

url = "http://www.stockholm2012.euspen.eu/",

}

Characterization of large area nanostructured surfaces using AFM measurements. / Calaon, Matteo ; Hansen, Hans Nørgaard ; Tosello, Guido et al.
Proceedings of the 12th euspen International Conference. The European Society for Precision Engineering and Nanotechnology, 2012.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Characterization of large area nanostructured surfaces using AFM measurements

AU - Calaon, Matteo

AU - Hansen, Hans Nørgaard

AU - Tosello, Guido

AU - Garnæs, Jørgen

AU - Ravn, Christian

AU - Tang, Peter Torben

PY - 2012

Y1 - 2012

N2 - A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%. AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.

AB - A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%. AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.

M3 - Article in proceedings

BT - Proceedings of the 12th euspen International Conference

PB - The European Society for Precision Engineering and Nanotechnology

T2 - 12th euspen International Conference

Y2 - 4 June 2012 through 12 June 2012

ER -

Characterization of large area nanostructured surfaces using AFM measurements

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