Characterization and optimal design of nonlinear MEMS resonators

Suguang Dou, B.S. Strachan, S.W. Shaw, Jakob Søndergaard Jensen

    Research output: Contribution to conference › Poster › Research › peer-review

    267 Downloads (Pure)
    Original languageEnglish
    Publication date2014
    Number of pages1
    Publication statusPublished - 2014
    EventSolid-State Sensors, Actuators and Microsystems Workshop - Hilton Head Island, SC, United States
    Duration: 8 Jun 2014 → 12 Jun 2014

    Workshop

    WorkshopSolid-State Sensors, Actuators and Microsystems Workshop
    Country/TerritoryUnited States
    CityHilton Head Island, SC
    Period08/06/2014 → 12/06/2014

    Bibliographical note

    This project was supported by NSF Grant 1234067 and ERC Starting Grant 279529 INNODYN

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