Characterization and optimal design of nonlinear MEMS resonators

Suguang Dou, B.S. Strachan, S.W. Shaw, Jakob Søndergaard Jensen

Research output: Contribution to conferencePosterResearchpeer-review

230 Downloads (Pure)
Original languageEnglish
Publication date2014
Number of pages1
Publication statusPublished - 2014
EventSolid-State Sensors, Actuators and Microsystems Workshop - Hilton Head Island, SC, United States
Duration: 8 Jun 201412 Jun 2014

Workshop

WorkshopSolid-State Sensors, Actuators and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island, SC
Period08/06/201412/06/2014

Bibliographical note

This project was supported by NSF Grant 1234067 and ERC Starting Grant 279529 INNODYN

Cite this