Characterisation of ionised magnetron sputtering plasmas for thin film deposition

C. Christou, Yukihiro Kusano, K.F. Chiu, I.M. Hutchings, Z.H. Barber

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of International Conference on Phenomena in Ionized Gases
Publication date1999
Pages35-36
Publication statusPublished - 1999
Externally publishedYes
Event24th International Conference on Phenomena in Ionized Gases (XXIV ICPIG) - Warsaw, Poland
Duration: 11 Jul 199916 Jul 1999

Conference

Conference24th International Conference on Phenomena in Ionized Gases (XXIV ICPIG)
CountryPoland
CityWarsaw
Period11/07/199916/07/1999

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