Centrifugal and hydroplaning phenomena in high-speed polishing

Wu Le Zhu, Soufian Ben Achour, Anthony Beaucamp*

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Super fine polishing with compliant tools can achieve nanoscale roughness, but has limited productivity due to low material removal rate (MRR). Increased spindle speed in high-speed polishing (HSP) might increase MRR, but significant challenges appear above 10,000 rpm because of centrifugal deformation of the tool and pad lifting due to hydroplaning phenomenon. Here, a tool offset compensation strategy is proposed for centrifugal deformation and novel pad patterning design that mitigates hydroplaning. Through this new approach, linear increase in MRR for spindle speed up to 24,000 rpm is demonstrated. This work lays the foundation for future developments of HSP in fabrication of ultraprecision optics.
Original languageEnglish
JournalCIRP annals
Volume68
Issue number1
Pages (from-to)369-372
ISSN0007-8506
DOIs
Publication statusPublished - 2019

Keywords

  • High-speed polishing
  • Material removal
  • Ultra precision

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