Abstract
Disclosed is a method of depositing islands of catalyst with a predetermined density, wherein in said method comprises the steps of: obtaining a diffusion barrier covered nano patterned surface comprising a plurality of plateaus, having a density of plateaus dependent on the predetermined density of islands of catalyst; depositing catalyst on said diffusion barrier covered nano patterned surface; and heating the diffusion barrier covered nano patterned surface after catalyst has been deposited, to anneal the catalyst, whereby islands of catalyst is formed. Wherein said diffusion barrier covered nano patterned surface is configured to ensure that no more than a single island of catalyst is formed on each plateau, so that a sub sequent growth of carbon nanotubes from the deposited islands result in that no more than a single carbon nanotube is grown from each plateau.
| Original language | English |
|---|---|
| IPC | B01J37/02 |
| Patent number | WO2013037951 |
| Filing date | 21/03/2013 |
| Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
| Publication status | Published - 2013 |
Bibliographical note
DTU reference number: 92599Also published as: US20110535524P, EP20110181657