Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
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Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Natural Science Pioneer Science Foundation of Chongqing of China cstc2019jcyj - xfkxX0006 Danmarks Grundforskningsfond http://dx.doi.org/10.13039/501100001732 DNRF103 Horizon 2020 Framework Programme http://dx.doi.org/10.13039/100010661 824962 H2020 Future and Emerging Technologies http://dx.doi.org/10.13039/100010664 785219 881603 National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809 51902306 FP7 Nanosciences, Nanotechnologies, Materials and new Production Technologies http://dx.doi.org/10.13039/100011263 604000 Institute for Basic Science http://dx.doi.org/10.13039/501100010446 IBS-R019-D1 yes � 2021 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license
© 2021 The Author(s). Published by IOP Publishing Ltd.
- CVD grapheme
- electrical mapping
- large-scale grapheme
- terahertz spectroscopy