Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Patrick R. Whelan; Binbin Zhou; Odile Bezencenet; Abhay Shivayogimath; Neeraj Mishra; Qian Shen; Bjarke S. Jessen; Iwona Pasternak; David M.A. Mackenzie; Jie Ji; Cunzhi Sun; Pierre Seneor; Bruno Dlubak; Birong Luo; Frederik W. Østerberg; Deping Huang; Haofei Shi; Da Luo; Meihui Wang; Rodney S. Ruoff; Ben R. Conran; Clifford McAleese; Cedric Huyghebaert; Steven Brems; Tim Booth; Ilargi Napal; Wlodek Strupinski; Dirch Hjorth Petersen; Stiven Forti; Camilla Coletti; Alexandre Jouvray; Kenneth B.K. Teo; Alba Centeno; Amaia Zurutuza; Pierre Legagneux; Peter Uhd Jepsen; Peter Bøggild

doi:10.1088/2053-1583/abdbcb

Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Patrick R. Whelan, Binbin Zhou, Odile Bezencenet, Abhay Shivayogimath, Neeraj Mishra, Qian Shen, Bjarke S. Jessen, Iwona Pasternak, David M.A. Mackenzie, Jie Ji, Cunzhi Sun, Pierre Seneor, Bruno Dlubak, Birong Luo, Frederik W. Østerberg, Deping Huang, Haofei Shi, Da Luo, Meihui Wang, Rodney S. RuoffBen R. Conran, Clifford McAleese, Cedric Huyghebaert, Steven Brems, Tim Booth, Ilargi Napal, Wlodek Strupinski, Dirch Hjorth Petersen, Stiven Forti, Camilla Coletti, Alexandre Jouvray, Kenneth B.K. Teo, Alba Centeno, Amaia Zurutuza, Pierre Legagneux, Peter Uhd Jepsen, Peter Bøggild^*

^*Corresponding author for this work

Research output: Contribution to journal › Review › peer-review

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Abstract

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

Original language	English
Article number	022003
Journal	2D materials
Volume	8
Issue number	2
ISSN	2053-1583
DOIs	https://doi.org/10.1088/2053-1583/abdbcb
Publication status	Published - 2021

Bibliographical note

Funding Information:
Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Natural Science Pioneer Science Foundation of Chongqing of China cstc2019jcyj - xfkxX0006 Danmarks Grundforskningsfond http://dx.doi.org/10.13039/501100001732 DNRF103 Horizon 2020 Framework Programme http://dx.doi.org/10.13039/100010661 824962 H2020 Future and Emerging Technologies http://dx.doi.org/10.13039/100010664 785219 881603 National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809 51902306 FP7 Nanosciences, Nanotechnologies, Materials and new Production Technologies http://dx.doi.org/10.13039/100011263 604000 Institute for Basic Science http://dx.doi.org/10.13039/501100010446 IBS-R019-D1 yes � 2021 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license

Publisher Copyright:
© 2021 The Author(s). Published by IOP Publishing Ltd.

Keywords

CVD grapheme
electrical mapping
large-scale grapheme
terahertz spectroscopy

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Whelan, P. R., Zhou, B., Bezencenet, O., Shivayogimath, A., Mishra, N., Shen, Q., Jessen, B. S., Pasternak, I., Mackenzie, D. M. A., Ji, J., Sun, C., Seneor, P., Dlubak, B., Luo, B., Østerberg, F. W., Huang, D., Shi, H., Luo, D., Wang, M., ... Bøggild, P. (2021). Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy. 2D materials, 8(2), Article 022003. https://doi.org/10.1088/2053-1583/abdbcb

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abstract = "Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios. ",

keywords = "CVD grapheme, electrical mapping, large-scale grapheme, terahertz spectroscopy",

author = "Whelan, {Patrick R.} and Binbin Zhou and Odile Bezencenet and Abhay Shivayogimath and Neeraj Mishra and Qian Shen and Jessen, {Bjarke S.} and Iwona Pasternak and Mackenzie, {David M.A.} and Jie Ji and Cunzhi Sun and Pierre Seneor and Bruno Dlubak and Birong Luo and {\O}sterberg, {Frederik W.} and Deping Huang and Haofei Shi and Da Luo and Meihui Wang and Ruoff, {Rodney S.} and Conran, {Ben R.} and Clifford McAleese and Cedric Huyghebaert and Steven Brems and Tim Booth and Ilargi Napal and Wlodek Strupinski and Petersen, {Dirch Hjorth} and Stiven Forti and Camilla Coletti and Alexandre Jouvray and Teo, {Kenneth B.K.} and Alba Centeno and Amaia Zurutuza and Pierre Legagneux and Jepsen, {Peter Uhd} and Peter B{\o}ggild",

note = "Funding Information: Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Natural Science Pioneer Science Foundation of Chongqing of China cstc2019jcyj - xfkxX0006 Danmarks Grundforskningsfond http://dx.doi.org/10.13039/501100001732 DNRF103 Horizon 2020 Framework Programme http://dx.doi.org/10.13039/100010661 824962 H2020 Future and Emerging Technologies http://dx.doi.org/10.13039/100010664 785219 881603 National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809 51902306 FP7 Nanosciences, Nanotechnologies, Materials and new Production Technologies http://dx.doi.org/10.13039/100011263 604000 Institute for Basic Science http://dx.doi.org/10.13039/501100010446 IBS-R019-D1 yes � 2021 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license Publisher Copyright: {\textcopyright} 2021 The Author(s). Published by IOP Publishing Ltd.",

year = "2021",

doi = "10.1088/2053-1583/abdbcb",

language = "English",

volume = "8",

journal = "2D materials",

issn = "2053-1583",

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Whelan, PR, Zhou, B, Bezencenet, O, Shivayogimath, A, Mishra, N, Shen, Q, Jessen, BS, Pasternak, I, Mackenzie, DMA, Ji, J, Sun, C, Seneor, P, Dlubak, B, Luo, B, Østerberg, FW, Huang, D, Shi, H, Luo, D, Wang, M, Ruoff, RS, Conran, BR, McAleese, C, Huyghebaert, C, Brems, S, Booth, T, Napal, I, Strupinski, W, Petersen, DH, Forti, S, Coletti, C, Jouvray, A, Teo, KBK, Centeno, A, Zurutuza, A, Legagneux, P, Jepsen, PU & Bøggild, P 2021, 'Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy', 2D materials, vol. 8, no. 2, 022003. https://doi.org/10.1088/2053-1583/abdbcb

TY - JOUR

T1 - Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

AU - Whelan, Patrick R.

AU - Zhou, Binbin

AU - Bezencenet, Odile

AU - Shivayogimath, Abhay

AU - Mishra, Neeraj

AU - Shen, Qian

AU - Jessen, Bjarke S.

AU - Pasternak, Iwona

AU - Mackenzie, David M.A.

AU - Ji, Jie

AU - Sun, Cunzhi

AU - Seneor, Pierre

AU - Dlubak, Bruno

AU - Luo, Birong

AU - Østerberg, Frederik W.

AU - Huang, Deping

AU - Shi, Haofei

AU - Luo, Da

AU - Wang, Meihui

AU - Ruoff, Rodney S.

AU - Conran, Ben R.

AU - McAleese, Clifford

AU - Huyghebaert, Cedric

AU - Brems, Steven

AU - Booth, Tim

AU - Napal, Ilargi

AU - Strupinski, Wlodek

AU - Petersen, Dirch Hjorth

AU - Forti, Stiven

AU - Coletti, Camilla

AU - Jouvray, Alexandre

AU - Teo, Kenneth B.K.

AU - Centeno, Alba

AU - Zurutuza, Amaia

AU - Legagneux, Pierre

AU - Jepsen, Peter Uhd

AU - Bøggild, Peter

N1 - Funding Information: Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Natural Science Pioneer Science Foundation of Chongqing of China cstc2019jcyj - xfkxX0006 Danmarks Grundforskningsfond http://dx.doi.org/10.13039/501100001732 DNRF103 Horizon 2020 Framework Programme http://dx.doi.org/10.13039/100010661 824962 H2020 Future and Emerging Technologies http://dx.doi.org/10.13039/100010664 785219 881603 National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809 51902306 FP7 Nanosciences, Nanotechnologies, Materials and new Production Technologies http://dx.doi.org/10.13039/100011263 604000 Institute for Basic Science http://dx.doi.org/10.13039/501100010446 IBS-R019-D1 yes � 2021 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license Publisher Copyright: © 2021 The Author(s). Published by IOP Publishing Ltd.

PY - 2021

Y1 - 2021

N2 - Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

AB - Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

KW - CVD grapheme

KW - electrical mapping

KW - large-scale grapheme

KW - terahertz spectroscopy

U2 - 10.1088/2053-1583/abdbcb

DO - 10.1088/2053-1583/abdbcb

M3 - Review

AN - SCOPUS:85101506041

SN - 2053-1583

VL - 8

JO - 2D materials

JF - 2D materials

IS - 2

M1 - 022003

ER -

Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Abstract

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Keywords

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