Carbon nanotubes integrated in electrically insulated channels for lab-on-a-chip applications

Klaus Bo Mogensen, L. Gangloff, Peter Bøggild, K. B. K. Teo, W. I. Milne, Jörg Peter Kutter

    Research output: Contribution to journalJournal articleResearchpeer-review


    A fabrication process for monolithic integration of vertically aligned carbon nanotubes in electrically insulated microfluidic channels is presented. A 150 nm thick amorphous silicon layer could be used both for anodic bonding of a glass lid to hermetically seal the microfluidic glass channels and for de-charging of the wafer during plasma enhanced chemical vapor deposition of the carbon nanotubes. The possibility of operating the device with electroosmotic flow was shown by performing standard electrophoretic separations of 50 mu M fluorescein and 50 mu M 5-carboxyfluorescein in a 25 mm long column containing vertical aligned carbon nanotubes. This is the first demonstration of electroosmotic pumping and electrokinetic separations in microfluidic channels with a monolithically integrated carbon nanotube forest.
    Original languageEnglish
    Issue number9
    Pages (from-to)095503
    Publication statusPublished - 2009


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