Capillary Induced Stiction of MEMS Materials

Yanxin Zhuang, Aric Kumaran Menon

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the World Tribology Congress III
Publication date	2005
Publication status	Published - 2005
Event	World Tribology Congress III - Washington DC, United States Duration: 12 Sep 2005 → 16 Sep 2005 Conference number: 3

Conference	World Tribology Congress III
Number	3
Country/Territory	United States
City	Washington DC
Period	12/09/2005 → 16/09/2005

OpenUrl availability

@inproceedings{9fcf29531b5d46f0b46fe1d5d55b9b96,

title = "Capillary Induced Stiction of MEMS Materials",

author = "Yanxin Zhuang and Menon, {Aric Kumaran}",

year = "2005",

language = "English",

booktitle = "Proceedings of the World Tribology Congress III",

note = "World Tribology Congress III, WTC2005 ; Conference date: 12-09-2005 Through 16-09-2005",

}