Capacitive Substrate Coupling of Row–Column-Addressed 2-D CMUT Arrays

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Row–column-addressed CMUT arrays suffer from low receive sensitivity of the bottom elements due to a capacitive coupling to the substrate. The capacitive coupling increases the parasitic capacitance. A simple approach to reduce the parasitic capacitance is presented, which is based on depleting the semiconductor substrate. To reduce the parasitic capacitance by 80% the bulk doping concentration should be at most 1012 cm-3. Experimental results show that the parasitic capacitance can be reduced by 87% by applying a substrate potential of 6V relative to the bottom electrodes. The depletion of the semiconductor substrate can be sustained for at least 10 minutes making it applicable for row–column-addressed CMUT arrays for ultrasonic imaging. Theoretically the reduced parasitic capacitance indicates that the receive sensitivity of the bottom elements can be increased by a factor of 2:1.
Original languageEnglish
Title of host publicationProceedings of 2016 IEEE International Ultrasonics Symposium
Number of pages4
Publication date2016
ISBN (Print)978-1-4673-9898-5
ISBN (Electronic)978-1-4673-9897-8
Publication statusPublished - 2016
Event2016 IEEE International Ultrasonics Symposium - Convention Center Vinci Tours, Tours, France
Duration: 18 Sep 201621 Sep 2016


Conference2016 IEEE International Ultrasonics Symposium
LocationConvention Center Vinci Tours


  • Substrates
  • Electrodes
  • Parasitic capacitance
  • Couplings
  • Doping
  • Capacitance measurement

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