This offline metrological capability handbook has been made in relation to HiMicro Task 3.3. The purpose of this document is to assess the metrological capability of the HiMicro partners and to gather the information of all available metrological instruments in the one single document. It provides a quick overview of what is possible today by the state of the art, what the HiMicro consortium can do and what metrological requirements we have concerning the HiMicro industrial demonstrators.
HiMicro Project Consortium on June 17, 2013. HiMicro (High Precision Micro Production Technologies) WP3 Precision Metrology for Complex Features. Task 3.3 Calibration and Metrology for Micro/Nano Dimensional Quality Control