Cantilever surface stress sensors with single-crystalline silicon piezoresistors

Peter Andreas Rasmussen, Ole Hansen, Anja Boisen

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We present a cantilever with piezoresistive readout optimized for measuring the static deflection due to isotropic surface stress on the surface of the cantilever [Sens. Actuators B 79(2-3), 115 (2001)]. To our knowledge nobody has addressed the difference in physical regimes, and its influence on cantilever sensors with integrated piezoresistive readout, that one finds between typical atomic force microscopy measurements and the surface stress sensors used in, e.g., biochemical measurements. We have simulated the response from piezoresistive cantilevers as a function of resistor type and placement for the two different regimes, i.e., surface stress measurements and force measurements. The model thus provides the means to specifically design piezoresistive cantilevers for surface stress measurements. (c) 2005 American Institute of Physics.
Original languageEnglish
JournalApplied Physics Letters
Issue number20
Pages (from-to)203502
Publication statusPublished - 2005

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Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.


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