TY - JOUR
T1 - Cantilever-like micromechanical sensors
AU - Boisen, Anja
AU - Dohn, Søren
AU - Keller, Stephan Sylvest
AU - Schmid, Silvan
AU - Tenje, Maria
PY - 2011
Y1 - 2011
N2 - The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.
AB - The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.
U2 - 10.1088/0034-4885/74/3/036101
DO - 10.1088/0034-4885/74/3/036101
M3 - Journal article
SN - 0034-4885
VL - 74
SP - 036101
JO - Reports on Progress in Physics
JF - Reports on Progress in Physics
IS - 3
ER -