Abstract
This work presents the design, fabrication and mechanical characterisation of an
integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used
as a biosensor by monitoring its bending caused by the surface stress generated due to
chemical reactions occurring on its surface. Here, we present a novel integrated optical
read-out scheme based on single-mode waveguides that enables the fabrication of a
compact system. The complete system is fabricated in the polymer SU-8. This manuscript
shows the principle of operation and the design well as the fabrication of the system and
characterisation of the read-out method.
Original language | English |
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Title of host publication | Proceedings of MicroTAS 2007 |
Publication date | 2007 |
Pages | 497-499 |
Publication status | Published - 2007 |
Event | 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences - Paris, France Duration: 7 Oct 2007 → 11 Oct 2007 Conference number: 11 http://www.microtasconferences.org/microtas2007/ |
Conference
Conference | 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences |
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Number | 11 |
Country | France |
City | Paris |
Period | 07/10/2007 → 11/10/2007 |
Internet address |
Keywords
- SU-8
- Cantilever sensor
- integrated waveguides