Cantilever-based sensor with integrated optical read-out using single mode waveguides

Maria Nordström, Dan Zauner, Montserrat Calleja, Jörg Hübner, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication of the system and characterisation of the read-out method.
    Original languageEnglish
    Title of host publicationProceedings of MicroTAS 2007
    Publication date2007
    Pages497-499
    Publication statusPublished - 2007
    Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences - Paris, France
    Duration: 7 Oct 200711 Oct 2007
    Conference number: 11
    http://www.microtasconferences.org/microtas2007/

    Conference

    Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    Number11
    CountryFrance
    CityParis
    Period07/10/200711/10/2007
    Internet address

    Keywords

    • SU-8
    • Cantilever sensor
    • integrated waveguides

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