The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.
|Title of host publication||Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems|
|Publication status||Published - 2001|
|Event||14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland|
Duration: 21 Jan 2001 → 25 Jan 2001
Conference number: 14
|Conference||14th IEEE International Conference on Micro Electro Mechanical Systems|
|Period||21/01/2001 → 25/01/2001|