Cantilever-based bio-chemical sensor integrated in a microliquid handling system

Jacob Thaysen; Rodolphe Marie; Anja Boisen

doi:10.1109/MEMSYS.2001.906561

Cantilever-based bio-chemical sensor integrated in a microliquid handling system

Jacob Thaysen, Rodolphe Marie, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.

Original language	English
Title of host publication	Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	IEEE
Publication date	2001
Pages	401-404
ISBN (Print)	0-7803-5998-4
DOIs	https://doi.org/10.1109/MEMSYS.2001.906561
Publication status	Published - 2001
Event	14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland Duration: 21 Jan 2001 → 25 Jan 2001 Conference number: 14

Conference

Conference	14th IEEE International Conference on Micro Electro Mechanical Systems
Number	14
Country/Territory	Switzerland
City	Interlaken
Period	21/01/2001 → 25/01/2001

Bibliographical note

Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "Cantilever-based bio-chemical sensor integrated in a microliquid handling system",

abstract = "The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.",

author = "Jacob Thaysen and Rodolphe Marie and Anja Boisen",

note = "Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2001 ; Conference date: 21-01-2001 Through 25-01-2001",

year = "2001",

doi = "10.1109/MEMSYS.2001.906561",

language = "English",

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Thaysen, J, Marie, R & Boisen, A 2001, Cantilever-based bio-chemical sensor integrated in a microliquid handling system. in Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems. IEEE, pp. 401-404, 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, 21/01/2001. https://doi.org/10.1109/MEMSYS.2001.906561

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T1 - Cantilever-based bio-chemical sensor integrated in a microliquid handling system

AU - Thaysen, Jacob

AU - Marie, Rodolphe

AU - Boisen, Anja

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Y1 - 2001

N2 - The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.

AB - The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.

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DO - 10.1109/MEMSYS.2001.906561

M3 - Article in proceedings

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EP - 404

BT - Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems

PB - IEEE

T2 - 14th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 21 January 2001 through 25 January 2001

ER -

Cantilever-based bio-chemical sensor integrated in a microliquid handling system

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