Cantilever-based bio-chemical sensor integrated in a microliquid handling system

Jacob Thaysen, Rodolphe Marie, Anja Boisen

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    Abstract

    The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.
    Original languageEnglish
    Title of host publicationProceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems
    PublisherIEEE
    Publication date2001
    Pages401-404
    ISBN (Print)0-7803-5998-4
    DOIs
    Publication statusPublished - 2001
    Event14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland
    Duration: 21 Jan 200125 Jan 2001
    Conference number: 14

    Conference

    Conference14th IEEE International Conference on Micro Electro Mechanical Systems
    Number14
    CountrySwitzerland
    CityInterlaken
    Period21/01/200125/01/2001

    Bibliographical note

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