Calibration guidelines for surface texture instruments - horizontal axis

Jan Lasson Andreasen; R. Krüger Shem

Calibration guidelines for surface texture instruments - horizontal axis

Jan Lasson Andreasen, R. Krüger Shem

Physikalisch-Technische Bundesanstalt

Research output: Book/Report › Report › Research › peer-review

Abstract

The present report is a documentation of the work carried out at DTU, on TASK 5.1: PROCEDURES FOR CALIBRATION IN X- AND Y- DIRECTION the project with contract SMT4-CT97-2176 with title: Calibration Standards for Surface Topography Measuring Systems down to Nanometric Scale. After a short introduction of the subject an the used strategi the three different developed guidlines covering the subject are presented.

Original language	English

Publisher	IPL
Number of pages	27
Publication status	Published - 2000

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Calibration guidelines for surface texture instruments - horizontal axis

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