TY - JOUR
T1 - Calibration artefact for the microscale with high aspect ratio: The fiber gauge
AU - Marinello, Francesco
AU - Savio, Enrico
AU - Carmignato, Simone
AU - De Chiffre, Leonardo
PY - 2008
Y1 - 2008
N2 - The paper presents a new concept of micro-artefact, the fiber gauge, consisting of a set of optical fibers
sticking out from a flat surface. The fibers are arranged as a regular array of different height cylinders,
with aspect ratios up to 20:1. The artefact is produced taking advantage of optical fibers manufacturing
technology, featuring relatively high geometrical accuracy, combined with very good mechanical
properties. The fiber gauge can be applied to calibration of most contact or non-contact instruments for
characterization of surface topographies and 3Dmicro-geometries, such as micro- or nano-CMMs, optical
instruments, etc. Different designs and dimensions allow for realization of structures that can be adapted
to various instruments calibration needs. Development, analysis and application of prototype artefacts
are reported.
AB - The paper presents a new concept of micro-artefact, the fiber gauge, consisting of a set of optical fibers
sticking out from a flat surface. The fibers are arranged as a regular array of different height cylinders,
with aspect ratios up to 20:1. The artefact is produced taking advantage of optical fibers manufacturing
technology, featuring relatively high geometrical accuracy, combined with very good mechanical
properties. The fiber gauge can be applied to calibration of most contact or non-contact instruments for
characterization of surface topographies and 3Dmicro-geometries, such as micro- or nano-CMMs, optical
instruments, etc. Different designs and dimensions allow for realization of structures that can be adapted
to various instruments calibration needs. Development, analysis and application of prototype artefacts
are reported.
U2 - 10.1016/j.cirp.2008.03.086
DO - 10.1016/j.cirp.2008.03.086
M3 - Journal article
VL - 57
SP - 497
EP - 500
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
SN - 0007-8506
IS - 1
ER -