Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Danilo Quagliotti, Guido Tosello, M. Agour, C. Flosky, A. Meier, O. Riemer, B. Dormann

    Research output: Book/ReportReportResearch

    Original languageEnglish
    PublisherHi-Micro project
    Number of pages36
    Publication statusPublished - 2015

    Bibliographical note

    FP7-2012-NMP-ICT-FoF, Grant No.:314055

    Cite this