Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5.: High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Danilo Quagliotti; Guido Tosello; M. Agour; C. Flosky; A. Meier; O.  Riemer; B. Dormann

Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Danilo Quagliotti, Guido Tosello, M. Agour, C. Flosky, A. Meier, O. Riemer, B. Dormann

Research output: Book/Report › Report › Research

Original language	English

Publisher	Hi-Micro project
Number of pages	36
Publication status	Published - 2015

Bibliographical note

FP7-2012-NMP-ICT-FoF, Grant No.:314055

OpenUrl availability

Full text

HiMicro: High Precision Micro Production Technologies
Tosello, G. (Project Participant), Islam, A. (Project Participant), Marhöfer, D. M. (PhD Student) & Giannekas, N. (Project Participant)
30/10/2012 → 30/11/2015
Project: Research
HiMicro: High Precision Micro Production Technologies
Tosello, G. (Project Participant), Islam, A. (Project Participant), Marhöfer, D. M. (Project Participant), Quagliotti, D. (Project Participant) & Giannekas, N. (Project Participant)
30/10/2012 → 30/11/2015
Project: Research

Cite this

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title = "Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5.: High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015",

author = "Danilo Quagliotti and Guido Tosello and M. Agour and C. Flosky and A. Meier and O. Riemer and B. Dormann",

note = "FP7-2012-NMP-ICT-FoF, Grant No.:314055",

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language = "English",

publisher = "Hi-Micro project",

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TY - RPRT

T1 - Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5.

T2 - High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

AU - Quagliotti, Danilo

AU - Tosello, Guido

AU - Agour, M.

AU - Flosky, C.

AU - Meier, A.

AU - Riemer, O.

AU - Dormann, B.

N1 - FP7-2012-NMP-ICT-FoF, Grant No.:314055

PY - 2015

Y1 - 2015

M3 - Report

BT - Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5.

PB - Hi-Micro project

ER -

Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Bibliographical note

OpenUrl availability

Projects

HiMicro: High Precision Micro Production Technologies

HiMicro: High Precision Micro Production Technologies

Cite this