Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Danilo Quagliotti, Guido Tosello, M. Agour, C. Flosky, A. Meier, O. Riemer, B. Dormann

Research output: Book/ReportReportResearch

Original languageEnglish
PublisherHi-Micro project
Number of pages36
Publication statusPublished - 2015

Bibliographical note

FP7-2012-NMP-ICT-FoF, Grant No.:314055

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