Calibrated Line Measurement with an Atomic Force Microscope

Niels Kofod, J. Garnæs, J. F. Jørgensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    Abstract
    Original languageEnglish
    Title of host publication1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology
    PublisherIPL
    Publication date2000
    Pages373-381
    Publication statusPublished - 2000
    Event1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology - Copenhagen, Denmark
    Duration: 28 May 200030 May 2000

    Conference

    Conference1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology
    CountryDenmark
    CityCopenhagen
    Period28/05/200030/05/2000

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