Bulk disk resonator based ultrasensitive mass sensor

Alberto Cagliani; Zachary James Davis

doi:10.1109/ICSENS.2009.5398403

Bulk disk resonator based ultrasensitive mass sensor

Alberto Cagliani, Zachary James Davis

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

In the framework of developing an innovative label-free sensor for multiarrayed biodetection applications, we present a novel bulk resonator based mass sensor. The sensor is a polysilicon disk which shows a Q-factor of 6400 in air at 68.8 MHz, resulting in mass resolutions down in the femtogram range. The sensor has been characterized in terms of sensitivity both for distributed mass detection, performing six consecutive depositions of e-beam evaporated Au, and localized mass detection, depositing approximately 7.5 pg of Pt/Ga/C three times consecutively with a Focused Ion Beam system. The sensor has an extremely high distributed mass to frequency shift sensitivity of 60104 Hzcm2/Â¿g and shows a localized mass to frequency sensitivity up to 4405 Hz/pg with a localized mass resolution down to 15 fg. The device has been fabricated with a new microfabrication process that uses only two photolitographic steps in order to minimize cost and complexity.

Original language	English
Title of host publication	Sensors, 2009 IEEE
Publisher	IEEE
Publication date	2009
Pages	1317-1320
ISBN (Print)	978-1-4244-4548-6
DOIs	https://doi.org/10.1109/ICSENS.2009.5398403
Publication status	Published - 2009
Event	8th IEEE Conference on Sensors - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009

Conference

Conference	8th IEEE Conference on Sensors
Country/Territory	New Zealand
City	Christchurch
Period	25/10/2009 → 28/10/2009

Bibliographical note

Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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abstract = "In the framework of developing an innovative label-free sensor for multiarrayed biodetection applications, we present a novel bulk resonator based mass sensor. The sensor is a polysilicon disk which shows a Q-factor of 6400 in air at 68.8 MHz, resulting in mass resolutions down in the femtogram range. The sensor has been characterized in terms of sensitivity both for distributed mass detection, performing six consecutive depositions of e-beam evaporated Au, and localized mass detection, depositing approximately 7.5 pg of Pt/Ga/C three times consecutively with a Focused Ion Beam system. The sensor has an extremely high distributed mass to frequency shift sensitivity of 60104 Hzcm2/{\^A}¿g and shows a localized mass to frequency sensitivity up to 4405 Hz/pg with a localized mass resolution down to 15 fg. The device has been fabricated with a new microfabrication process that uses only two photolitographic steps in order to minimize cost and complexity.",

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ER -

Bulk disk resonator based ultrasensitive mass sensor

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