Broadband antireflection nanodome structures on SiC substrate

Yiyu Ou, Xiaolong Zhu, Uffe Visbech Møller, Sanshui Xiao, Haiyan Ou

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.
Original languageEnglish
Title of host publicationProceedings of the 10th International Conference on Group IV Photonics
PublisherIEEE
Publication date2013
Pages39-40
ISBN (Print)978-1-4673-5804-0
Publication statusPublished - 2013
Event10th International Conference on Group IV Photonics (GFP 2013) - Seoul, Korea, Republic of
Duration: 28 Aug 201330 Aug 2013
http://www.gfp-ieee.org/

Conference

Conference10th International Conference on Group IV Photonics (GFP 2013)
CountryKorea, Republic of
CitySeoul
Period28/08/201330/08/2013
Internet address

Keywords

  • Nanofabrication
  • Sub-wavelength material
  • Surface antireflection

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