Broadband antireflection nanodome structures on SiC substrate

Yiyu Ou; Xiaolong Zhu; Uffe Visbech Møller; Sanshui  Xiao; Haiyan Ou

Broadband antireflection nanodome structures on SiC substrate

Yiyu Ou, Xiaolong Zhu, Uffe Visbech Møller, Sanshui Xiao, Haiyan Ou

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

Original language	English
Title of host publication	Proceedings of the 10th International Conference on Group IV Photonics
Publisher	IEEE
Publication date	2013
Pages	39-40
ISBN (Print)	978-1-4673-5804-0
Publication status	Published - 2013
Event	2013 10th IEEE International Conference on Group IV Photonics - Seoul, Korea, Republic of Duration: 28 Aug 2013 → 30 Aug 2013 Conference number: 10 https://ieeexplore.ieee.org/xpl/conhome/6621626/proceeding

Conference

Conference	2013 10th IEEE International Conference on Group IV Photonics
Number	10
Country/Territory	Korea, Republic of
City	Seoul
Period	28/08/2013 → 30/08/2013
Internet address	https://ieeexplore.ieee.org/xpl/conhome/6621626/proceeding

Keywords

Nanofabrication
Sub-wavelength material
Surface antireflection

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title = "Broadband antireflection nanodome structures on SiC substrate",

abstract = "Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.",

keywords = "Nanofabrication, Sub-wavelength material, Surface antireflection",

author = "Yiyu Ou and Xiaolong Zhu and M{\o}ller, {Uffe Visbech} and Sanshui Xiao and Haiyan Ou",

year = "2013",

language = "English",

isbn = "978-1-4673-5804-0",

pages = "39--40",

booktitle = "Proceedings of the 10th International Conference on Group IV Photonics",

publisher = "IEEE",

address = "United States",

note = "2013 10th IEEE International Conference on Group IV Photonics, GFP 2013 ; Conference date: 28-08-2013 Through 30-08-2013",

url = "https://ieeexplore.ieee.org/xpl/conhome/6621626/proceeding",

}

TY - GEN

T1 - Broadband antireflection nanodome structures on SiC substrate

AU - Ou, Yiyu

AU - Zhu, Xiaolong

AU - Møller, Uffe Visbech

AU - Xiao, Sanshui

AU - Ou, Haiyan

N1 - Conference code: 10

PY - 2013

Y1 - 2013

N2 - Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

AB - Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

KW - Nanofabrication

KW - Sub-wavelength material

KW - Surface antireflection

M3 - Article in proceedings

SN - 978-1-4673-5804-0

SP - 39

EP - 40

BT - Proceedings of the 10th International Conference on Group IV Photonics

PB - IEEE

T2 - 2013 10th IEEE International Conference on Group IV Photonics

Y2 - 28 August 2013 through 30 August 2013

ER -

Broadband antireflection nanodome structures on SiC substrate

Abstract

Conference

Keywords

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