Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

Yiyu Ou; Xiaolong Zhu; Valdas Jokubavicius; Rosita Yakimova; N. Asger Mortensen; Mikael Syväjärvi; Sanshui  Xiao; Haiyan Ou

doi:10.1038/srep04662

Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

Yiyu Ou, Xiaolong Zhu, Valdas Jokubavicius, Rosita Yakimova, N. Asger Mortensen, Mikael Syväjärvi, Sanshui Xiao, Haiyan Ou

Linköping University

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Abstract

We demonstrate a time-efficient and low-cost approach to fabricate Si₃N₄ coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si₃N₄ coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

Original language	English
Article number	4662
Journal	Scientific Reports
Volume	4
Pages (from-to)	1-4
ISSN	2045-2322
DOIs	https://doi.org/10.1038/srep04662
Publication status	Published - 2014

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@article{a79d9eaf18d34423848a37299fee8e7e,

title = "Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures",

abstract = "We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.",

author = "Yiyu Ou and Xiaolong Zhu and Valdas Jokubavicius and Rosita Yakimova and Mortensen, {N. Asger} and Mikael Syv{\"a}j{\"a}rvi and Sanshui Xiao and Haiyan Ou",

year = "2014",

doi = "10.1038/srep04662",

language = "English",

volume = "4",

pages = "1--4",

journal = "Scientific Reports",

issn = "2045-2322",

publisher = "Nature Publishing Group",

}

TY - JOUR

T1 - Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

AU - Ou, Yiyu

AU - Zhu, Xiaolong

AU - Jokubavicius, Valdas

AU - Yakimova, Rosita

AU - Mortensen, N. Asger

AU - Syväjärvi, Mikael

AU - Xiao, Sanshui

AU - Ou, Haiyan

PY - 2014

Y1 - 2014

N2 - We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

AB - We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

U2 - 10.1038/srep04662

DO - 10.1038/srep04662

M3 - Journal article

C2 - 24722521

SN - 2045-2322

VL - 4

SP - 1

EP - 4

JO - Scientific Reports

JF - Scientific Reports

M1 - 4662

ER -

Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

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