Abstract
In the present work, antireflective sub-wavelength structures have been fabricated on fluorescent 6H-SiC to enhance the white light extraction efficiency by using the reactive-ion etching method. Broadband and omnidirectional antireflection characteristics show that 6H-SiC with antireflective sub-wavelength structures suppress the average surface reflection significantly from 20.5% to 1.01% over a wide spectral range of 390-784 nm. The luminescence intensity of the fluorescent 6H-SiC could be enhanced in the whole emission angle range. It maintains an enhancement larger than 91% up to the incident angle of 70 degrees, while the largest enhancement of 115.4% could be obtained at 16 degrees. The antireflective sub-wavelength structures on fluorescent 6H-SiC could also preserve the luminescence spectral profile at a large emission angle by eliminating the Fabry-Perot microcavity interference effect.
Original language | English |
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Journal | Optics Express |
Volume | 20 |
Issue number | 7 |
Pages (from-to) | 7575-7579 |
ISSN | 1094-4087 |
DOIs | |
Publication status | Published - 2012 |