Black silicon with tunnel oxide passivated contacts

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedings – Annual report year: 2018Researchpeer-review

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We investigate surfaces of black silicon (bSi) fabricated by reactive ion etch (RIE) on n-type Si substrates and passivated by in-situ doped polycrystalline Si (poly-Si) deposited by low pressure chemical vapor deposition (LPCVD). We achieved full surface coverage of bSi surfaces for poly-Si thickness of 20 nm. We determined sheet resistance on p-type and n-type poly-Si by means of micro four-point probe measurements. Effective lifetime mapping on symmetrically passivated samples shows that n-type poly-Si offers excellent surface passivation after hydrogenation, reaching effective lifetime values of almost 4 ms on non-textured substrates. P-type poly-Si shows values of effective lifetime lower than 800 μs and requires further improvement. We calculated i-Voc of up to 711 mV and 609 mV for asymmetrically passivated lifetime samples without texturing and with bSi, respectively. The effective lifetime is limited by the less-than-optimal passivation of the p-type poly-Si. Preliminary solar cell measurements indicate that both cell voltage and fill factor require major improvement on textured surfaces. Current work is directed towards the following goals: improving the quality of the p-type poly-Si; testing possible replacement of wet chemistry to grow the tunnel oxide using dry furnace oxidation; fabricating and comparing cells with p-n junction at the front or at the bottom of the cell.
Original languageEnglish
Title of host publicationProceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition
Publication date2018
Pages668-671
ISBN (Electronic)3-936338-50-7
DOIs
Publication statusPublished - 2018
Event35th European Photovoltaic Solar Energy Conference and Exhibition - Brussels, Belgium
Duration: 24 Sep 201828 Sep 2018

Conference

Conference35th European Photovoltaic Solar Energy Conference and Exhibition
CountryBelgium
CityBrussels
Period24/09/201828/09/2018
CitationsWeb of Science® Times Cited: No match on DOI

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