TY - JOUR
T1 - Black silicon laser-doped selective emitter solar cell with 18.1% efficiency
AU - Davidsen, Rasmus Schmidt
AU - Li, Hongzhao
AU - To, Alexander
AU - Wang, Xi
AU - Han, Alex
AU - An, Jack
AU - Colwell, Jack
AU - Chan, Catherine
AU - Wenham, Alison
AU - Schmidt, Michael Stenbæk
AU - Boisen, Anja
AU - Hansen, Ole
AU - Wenham, Stuart
AU - Barnett, Allen
PY - 2016
Y1 - 2016
N2 - We report fabrication of nanostructured, laser-doped selective emitter (LDSE) silicon solar cells with power conversion efficiency of 18.1% and a fill factor (FF) of 80.1%. The nanostructured solar cells were realized through a single step, mask-less, scalable reactive ion etch (RIE) texturing of the surface. The selective emitter was formed by means of laser doping using a continuous wave (CW) laser and subsequent contact formation using light-induced plating of Ni and Cu. The combination of RIE-texturing and a LDSE cell design has to our knowledge not been demonstrated previously. The resulting efficiency indicates a promising potential, especially considering that the cell reported in this work is the first proof-of-concept and that the fabricated cell is not fully optimized in terms of plating, emitter sheet resistance and surface passivation. Due to the scalable nature and simplicity of RIE-texturing as well as the LDSE process, we consider this specific combination a promising candidate for a cost-efficient process for future Si solar cells.
AB - We report fabrication of nanostructured, laser-doped selective emitter (LDSE) silicon solar cells with power conversion efficiency of 18.1% and a fill factor (FF) of 80.1%. The nanostructured solar cells were realized through a single step, mask-less, scalable reactive ion etch (RIE) texturing of the surface. The selective emitter was formed by means of laser doping using a continuous wave (CW) laser and subsequent contact formation using light-induced plating of Ni and Cu. The combination of RIE-texturing and a LDSE cell design has to our knowledge not been demonstrated previously. The resulting efficiency indicates a promising potential, especially considering that the cell reported in this work is the first proof-of-concept and that the fabricated cell is not fully optimized in terms of plating, emitter sheet resistance and surface passivation. Due to the scalable nature and simplicity of RIE-texturing as well as the LDSE process, we consider this specific combination a promising candidate for a cost-efficient process for future Si solar cells.
KW - Black silicon
KW - Reactive ion etching
KW - Laser doping
KW - LDSE
KW - Plating
U2 - 10.1016/j.solmat.2015.10.018
DO - 10.1016/j.solmat.2015.10.018
M3 - Journal article
SN - 0927-0248
VL - 144
SP - 740
EP - 747
JO - Solar Energy Materials & Solar Cells
JF - Solar Energy Materials & Solar Cells
ER -