Abstract

Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.
Original languageEnglish
Publication date2021
Number of pages2
DOIs
Publication statusPublished - 2021
Event27th International Semiconductor Laser Conference - Potsdam, Germany
Duration: 10 Oct 202114 Oct 2021
https://www.islc2021.org

Conference

Conference27th International Semiconductor Laser Conference
Country/TerritoryGermany
CityPotsdam
Period10/10/202114/10/2021
Internet address

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