Bidirectional electrostatic MEMS tunable VCSELs

Arnhold Simonsen; Søren Engelberth Hansen; Masoud Payandeh; Andrey Marchevsky; Gyeong Cheol Park; Hitesh Kumar Sahoo; Elizaveta Semenova; Ole Hansen; Kresten Yvind

doi:10.1109/ISLC51662.2021.9615710

Bidirectional electrostatic MEMS tunable VCSELs

Arnhold Simonsen, Søren Engelberth Hansen, Masoud Payandeh, Andrey Marchevsky, Gyeong Cheol Park, Hitesh Kumar Sahoo, Elizaveta Semenova, Ole Hansen, Kresten Yvind

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Abstract

Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.

Original language	English
Publication date	2021
Number of pages	2
DOIs	https://doi.org/10.1109/ISLC51662.2021.9615710
Publication status	Published - 2021
Event	27^th International Semiconductor Laser Conference - Potsdam, Germany Duration: 10 Oct 2021 → 14 Oct 2021 https://www.islc2021.org

Conference

Conference	27^th International Semiconductor Laser Conference
Country/Territory	Germany
City	Potsdam
Period	10/10/2021 → 14/10/2021
Internet address	https://www.islc2021.org

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10.1109/ISLC51662.2021.9615710

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@conference{e21c3c8bd0384c7b83947a9892b6e3c8,

title = "Bidirectional electrostatic MEMS tunable VCSELs",

abstract = "Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.",

author = "Arnhold Simonsen and Hansen, {S{\o}ren Engelberth} and Masoud Payandeh and Andrey Marchevsky and Park, {Gyeong Cheol} and {Kumar Sahoo}, Hitesh and Elizaveta Semenova and Ole Hansen and Kresten Yvind",

year = "2021",

doi = "10.1109/ISLC51662.2021.9615710",

language = "English",

note = "27<sup>th</sup> International Semiconductor Laser Conference , ISLC 2021 ; Conference date: 10-10-2021 Through 14-10-2021",

url = "https://www.islc2021.org",

}

TY - ABST

T1 - Bidirectional electrostatic MEMS tunable VCSELs

AU - Simonsen, Arnhold

AU - Hansen, Søren Engelberth

AU - Payandeh, Masoud

AU - Marchevsky, Andrey

AU - Park, Gyeong Cheol

AU - Kumar Sahoo, Hitesh

AU - Semenova, Elizaveta

AU - Hansen, Ole

AU - Yvind, Kresten

PY - 2021

Y1 - 2021

N2 - Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.

AB - Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.

U2 - 10.1109/ISLC51662.2021.9615710

DO - 10.1109/ISLC51662.2021.9615710

M3 - Conference abstract for conference

T2 - 27<sup>th</sup> International Semiconductor Laser Conference

Y2 - 10 October 2021 through 14 October 2021

ER -

Bidirectional electrostatic MEMS tunable VCSELs

Abstract

Conference

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