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Benchmarking of 50 nm features in thermal nanoimprint
C. Gourgon, N. Chaix, H. Schift, M. Tormen, S. Landis, C.M.S. Torres, Anders Kristensen, Rasmus Haugstrup Pedersen, Mads Brøkner Christiansen, I. Fernandez-Cuesta, D. Mendels, L. Montelius, T. Haatainen
Research output: Contribution to journal › Journal article › Research › peer-review