Benchmarking of 50 nm features in thermal nanoimprint

C. Gourgon, N. Chaix, H. Schift, M. Tormen, S. Landis, C.M.S. Torres, Anders Kristensen, Rasmus Haugstrup Pedersen, Mads Brøkner Christiansen, I. Fernandez-Cuesta, D. Mendels, L. Montelius, T. Haatainen

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