BCB polymer based row-column addressed CMUT

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.
Original languageEnglish
Title of host publicationProceedings of the 2017 IEEE International Ultrasonics Symposium
Number of pages4
PublisherIEEE
Publication date2017
ISBN (Print)9781538633823
DOIs
Publication statusPublished - 2017
Event2017 IEEE International Ultrasonics Symposium (IUS) - Omni Shoreham Hotel, Washington, United States
Duration: 6 Sep 20179 Sep 2017
http://ewh.ieee.org/conf/ius/2017/

Conference

Conference2017 IEEE International Ultrasonics Symposium (IUS)
LocationOmni Shoreham Hotel
CountryUnited States
CityWashington
Period06/09/201709/09/2017
Internet address

Cite this

@inproceedings{46b8dd4c24b644ee8624b056d3b9ba56,
title = "BCB polymer based row-column addressed CMUT",
abstract = "This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.",
author = "Havreland, {Andreas Spandet} and Ommen, {Martin Lind} and Chantal Silvestre and Mathias Engholm and Jensen, {J{\o}rgen Arendt} and Thomsen, {Erik Vilain}",
year = "2017",
doi = "10.1109/ULTSYM.2017.8091939",
language = "English",
isbn = "9781538633823",
booktitle = "Proceedings of the 2017 IEEE International Ultrasonics Symposium",
publisher = "IEEE",
address = "United States",

}

Havreland, AS, Ommen, ML, Silvestre, C, Engholm, M, Jensen, JA & Thomsen, EV 2017, BCB polymer based row-column addressed CMUT. in Proceedings of the 2017 IEEE International Ultrasonics Symposium . IEEE, 2017 IEEE International Ultrasonics Symposium (IUS), Washington, United States, 06/09/2017. https://doi.org/10.1109/ULTSYM.2017.8091939

BCB polymer based row-column addressed CMUT. / Havreland, Andreas Spandet; Ommen, Martin Lind; Silvestre, Chantal; Engholm, Mathias; Jensen, Jørgen Arendt; Thomsen, Erik Vilain.

Proceedings of the 2017 IEEE International Ultrasonics Symposium . IEEE, 2017.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

TY - GEN

T1 - BCB polymer based row-column addressed CMUT

AU - Havreland, Andreas Spandet

AU - Ommen, Martin Lind

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AU - Jensen, Jørgen Arendt

AU - Thomsen, Erik Vilain

PY - 2017

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N2 - This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.

AB - This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.

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