BCB polymer based row-column addressed CMUT

Andreas Spandet Havreland; Martin Lind Ommen; Chantal Silvestre; Mathias Engholm; Jørgen Arendt Jensen; Erik Vilain Thomsen

doi:10.1109/ULTSYM.2017.8091939

BCB polymer based row-column addressed CMUT

Andreas Spandet Havreland, Martin Lind Ommen, Chantal Silvestre, Mathias Engholm, Jørgen Arendt Jensen, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.

Original language	English
Title of host publication	Proceedings of the 2017 IEEE International Ultrasonics Symposium
Number of pages	4
Publisher	IEEE
Publication date	2017
ISBN (Print)	9781538633823
DOIs	https://doi.org/10.1109/ULTSYM.2017.8091939
Publication status	Published - 2017
Event	2017 IEEE International Ultrasonics Symposium - Omni Shoreham Hotel, Washington D. C., United States Duration: 6 Sept 2017 → 9 Sept 2017 http://ewh.ieee.org/conf/ius/2017/

Conference

Conference	2017 IEEE International Ultrasonics Symposium
Location	Omni Shoreham Hotel
Country/Territory	United States
City	Washington D. C.
Period	06/09/2017 → 09/09/2017
Internet address	http://ewh.ieee.org/conf/ius/2017/

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10.1109/ULTSYM.2017.8091939

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title = "BCB polymer based row-column addressed CMUT",

abstract = "This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.",

author = "Havreland, {Andreas Spandet} and Ommen, {Martin Lind} and Chantal Silvestre and Mathias Engholm and Jensen, {J{\o}rgen Arendt} and Thomsen, {Erik Vilain}",

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doi = "10.1109/ULTSYM.2017.8091939",

language = "English",

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booktitle = "Proceedings of the 2017 IEEE International Ultrasonics Symposium",

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AU - Havreland, Andreas Spandet

AU - Ommen, Martin Lind

AU - Silvestre, Chantal

AU - Engholm, Mathias

AU - Jensen, Jørgen Arendt

AU - Thomsen, Erik Vilain

PY - 2017

Y1 - 2017

N2 - This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.

AB - This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.

U2 - 10.1109/ULTSYM.2017.8091939

DO - 10.1109/ULTSYM.2017.8091939

M3 - Article in proceedings

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BT - Proceedings of the 2017 IEEE International Ultrasonics Symposium

PB - IEEE

T2 - 2017 IEEE International Ultrasonics Symposium

Y2 - 6 September 2017 through 9 September 2017

ER -

BCB polymer based row-column addressed CMUT

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