BCB polymer based row-column addressed CMUT

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This paper presents an inexpensive, low temperature and rapid fabrication method for capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the bonding and dielectric properties of the photosensitive polymer Benzocyclobutene (BCB). A BCB based row-column addressed CMUT with integrated apodization has been fabricated and characterized with initial impedance measurement. Furthermore, two linear BCB CMUT arrays have been fabricated with different bottom electrode designs and characterized acoustically. All the fabricated arrays have a center frequency of 2.5 MHz when immersed into water and a pull-in voltage of 75 V. Stability tests have showed a stable coupling coefficient of approximately 0.1 during 10 hours of biased operation. Acoustic measurements, with a hydrophone positioned 1 cm from the CMUTs, have showed a peak-to-peak pressure of 14 kPa.
Original languageEnglish
Title of host publicationProceedings of the 2017 IEEE International Ultrasonics Symposium
Number of pages4
Publication date2017
ISBN (Print)9781538633823
Publication statusPublished - 2017
Event2017 IEEE International Ultrasonics Symposium (IUS) - Omni Shoreham Hotel, Washington, United States
Duration: 6 Sep 20179 Sep 2017


Conference2017 IEEE International Ultrasonics Symposium (IUS)
LocationOmni Shoreham Hotel
CountryUnited States
Internet address

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