Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity

Adam Monkowski; Martin Johansson; Jane Hvolbæk Nielsen; Ib Chorkendorff; Ole Hansen

doi:10.1016/j.mee.2009.01.029

Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity

Adam Monkowski, Martin Johansson, Jane Hvolbæk Nielsen, Ib Chorkendorff, Ole Hansen

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

We propose a new type of microreactor to study heterogeneous catalytic systems. The proposed device operates using a batch reactor scheme, in which catalyst and reactant are introduced in one step and analyzed in a subsequent step. This differs from a flow microreactor in which reaction and analysis take place continuously. A batch microreactor could evaluate the products from a very small amount of catalyst possibly

Original language	English
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
Pages (from-to)	1389-1392
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2009.01.029
Publication status	Published - 2009
Event	34th International Conference on Micro and Nano Engineering - Athens, Greece Duration: 15 Sept 2008 → 18 Sept 2008 Conference number: 34

Conference

Conference	34th International Conference on Micro and Nano Engineering
Number	34
Country/Territory	Greece
City	Athens
Period	15/09/2008 → 18/09/2008

Keywords

UHV
MEMS
Microreactors
Microfabrication
Packaging
Catalysis

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10.1016/j.mee.2009.01.029

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title = "Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity",

abstract = "We propose a new type of microreactor to study heterogeneous catalytic systems. The proposed device operates using a batch reactor scheme, in which catalyst and reactant are introduced in one step and analyzed in a subsequent step. This differs from a flow microreactor in which reaction and analysis take place continuously. A batch microreactor could evaluate the products from a very small amount of catalyst possibly ",

keywords = "UHV, MEMS, Microreactors, Microfabrication, Packaging, Catalysis",

author = "Adam Monkowski and Martin Johansson and Nielsen, {Jane Hvolb{\ae}k} and Ib Chorkendorff and Ole Hansen",

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language = "English",

volume = "86",

pages = "1389--1392",

journal = "Microelectronic Engineering",

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T1 - Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity

AU - Monkowski, Adam

AU - Johansson, Martin

AU - Nielsen, Jane Hvolbæk

AU - Chorkendorff, Ib

AU - Hansen, Ole

N1 - Conference code: 34

PY - 2009

Y1 - 2009

N2 - We propose a new type of microreactor to study heterogeneous catalytic systems. The proposed device operates using a batch reactor scheme, in which catalyst and reactant are introduced in one step and analyzed in a subsequent step. This differs from a flow microreactor in which reaction and analysis take place continuously. A batch microreactor could evaluate the products from a very small amount of catalyst possibly

AB - We propose a new type of microreactor to study heterogeneous catalytic systems. The proposed device operates using a batch reactor scheme, in which catalyst and reactant are introduced in one step and analyzed in a subsequent step. This differs from a flow microreactor in which reaction and analysis take place continuously. A batch microreactor could evaluate the products from a very small amount of catalyst possibly

KW - UHV

KW - MEMS

KW - Microreactors

KW - Microfabrication

KW - Packaging

KW - Catalysis

U2 - 10.1016/j.mee.2009.01.029

DO - 10.1016/j.mee.2009.01.029

M3 - Conference article

SN - 0167-9317

VL - 86

SP - 1389

EP - 1392

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-6

T2 - 34th International Conference on Micro and Nano Engineering

Y2 - 15 September 2008 through 18 September 2008

ER -

Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity

Abstract

Conference

Keywords

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