Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer

S. Massahi*, L. M. Vu, D. D.M. Ferreira, F. E. Christensen, N. Gellert, P. L. Henriksen, S. Svendsen, A. S. Jegers, M. Collon, B. Landgraf, D. Girou, A. Thete, B. Shortt, I. Ferreira, M. Bavdaz

*Corresponding author for this work

Research output: Contribution to conferencePosterResearchpeer-review

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Abstract

The demand for X-ray optics increases and so do their performance requirements. Iridium (Ir) thin film coatings have proven to be very robust and exhibit excellent reflective properties within the X-ray regime. However, the residual stress in Ir thin films is high and studies show that thin film Ir coatings with a thickness of 10–30 nm exhibit residual compressive stress1 as illustrated in Figure 1.
Original languageEnglish
Publication date2020
Number of pages1
Publication statusPublished - 2020
EventSpace Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray - Online event
Duration: 14 Dec 202018 Dec 2020

Conference

ConferenceSpace Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray
LocationOnline event
Period14/12/202018/12/2020

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