Autonomous multi-sensor micro-system for measurement of ocean water salinity

Anders Hyldgård, Dennis Mortensen, Karen Birkelund, Ole Hansen, Erik Vilain Thomsen

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

This paper describes the design, fabrication and application of a micro-fabricated salinity sensor system. The theoretical electrochemical behaviour is described using electrical equivalent diagrams and simple scaling properties are investigated analytically and numerically using finite element method (FEM). The chip design and fabrication is described and measurement results of two different electrode designs are presented. The 4 mm x 4 mm multi-sensor allows for salinity determination with an accuracy of +/- 0.5 psu through determination of the electrical conductivity, temperature and pressure with accuracies of +/- 0.6 mS, +/- 0.065 degrees C and +/- 0.05 bar, respectively.
Original languageEnglish
JournalSensors and Actuators A: Physical
Volume147
Issue number2
Pages (from-to)474-484
ISSN0924-4247
DOIs
Publication statusPublished - 2008

Keywords

  • conductivity
  • CTD
  • multi-sensor
  • micro-system
  • salinity
  • silicon
  • depth
  • temperature

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