Automated Micro Hall Effect measurements

Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Rong Lin, Peter F. Nielsen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Abstract

With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.
Original languageEnglish
Title of host publicationProceedings of the 2014 7th International Silicon-Germanium Technology and Device Meeting
Number of pages2
Publication date2014
Pages37-38
DOIs
Publication statusPublished - 2014
Event2014 7th International Silicon-Germanium Technology and Device Meeting - Singapore, Singapore
Duration: 2 Jun 20144 Jun 2014

Conference

Conference2014 7th International Silicon-Germanium Technology and Device Meeting
CountrySingapore
CitySingapore
Period02/06/201404/06/2014

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