With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.
|Title of host publication||Proceedings of the 2014 7th International Silicon-Germanium Technology and Device Meeting|
|Number of pages||2|
|Publication status||Published - 2014|
|Event||2014 7th International Silicon-Germanium Technology and Device Meeting - Singapore, Singapore|
Duration: 2 Jun 2014 → 4 Jun 2014
|Conference||2014 7th International Silicon-Germanium Technology and Device Meeting|
|Period||02/06/2014 → 04/06/2014|