Abstract
With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.
Original language | English |
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Title of host publication | Proceedings of the 2014 7th International Silicon-Germanium Technology and Device Meeting |
Number of pages | 2 |
Publication date | 2014 |
Pages | 37-38 |
DOIs | |
Publication status | Published - 2014 |
Event | 2014 7th International Silicon-Germanium Technology and Device Meeting - Singapore, Singapore Duration: 2 Jun 2014 → 4 Jun 2014 |
Conference
Conference | 2014 7th International Silicon-Germanium Technology and Device Meeting |
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Country/Territory | Singapore |
City | Singapore |
Period | 02/06/2014 → 04/06/2014 |