Atomic force microscope characterization of a resonating nanocantilever

G. Abadal; Zachary James Davis; X. Borrise; Ole Hansen; Anja Boisen; N. Barniol; F. Perez-Murano; F. Serra

doi:10.1016/S0304-3991(03)00037-8

Atomic force microscope characterization of a resonating nanocantilever

G. Abadal, Zachary James Davis, X. Borrise, Ole Hansen, Anja Boisen, N. Barniol, F. Perez-Murano, F. Serra

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic noncontact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model. (C) 2003 Elsevier Science B.V. All rights reserved.

Original language	English
Journal	Ultramicroscopy
Volume	97
Issue number	1-4
Pages (from-to)	127-133
ISSN	0304-3991
DOIs	https://doi.org/10.1016/S0304-3991(03)00037-8
Publication status	Published - 2003

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title = "Atomic force microscope characterization of a resonating nanocantilever",

abstract = "An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic noncontact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model. (C) 2003 Elsevier Science B.V. All rights reserved. ",

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T1 - Atomic force microscope characterization of a resonating nanocantilever

AU - Abadal, G.

AU - Davis, Zachary James

AU - Borrise, X.

AU - Hansen, Ole

AU - Boisen, Anja

AU - Barniol, N.

AU - Perez-Murano, F.

AU - Serra, F.

PY - 2003

Y1 - 2003

N2 - An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic noncontact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model. (C) 2003 Elsevier Science B.V. All rights reserved.

AB - An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic noncontact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model. (C) 2003 Elsevier Science B.V. All rights reserved.

U2 - 10.1016/S0304-3991(03)00037-8

DO - 10.1016/S0304-3991(03)00037-8

M3 - Journal article

SN - 0304-3991

VL - 97

SP - 127

EP - 133

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-4

ER -

Atomic force microscope characterization of a resonating nanocantilever

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