Applicability of Acoustic Emission monitoring to micro polishing

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Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing. Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.
Original languageEnglish
Title of host publicationProceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology
EditorsD. Billington, R. K. Leach, D. Phillips, O. Riemer, E. Savio
PublisherThe European Society for Precision Engineering and Nanotechnology
Publication date2018
Pages385-386
ISBN (Electronic)9780995775121
Publication statusPublished - 2018
Event18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18) - Venice, Italy
Duration: 4 Jun 20188 Jun 2018

Conference

Conference18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18)
CountryItaly
CityVenice
Period04/06/201808/06/2018

    Research areas

  • Micro-Polishing, End Point Detection (EPD), Monitoring strategies

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