Applicability of Acoustic Emission monitoring to micro polishing

Soufian Ben Achour; Giuliano Bissacco; L. De Chiffre

Applicability of Acoustic Emission monitoring to micro polishing

Soufian Ben Achour, Giuliano Bissacco, L. De Chiffre

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

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Abstract

Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing. Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.

Original language	English
Title of host publication	Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology
Editors	D. Billington, R. K. Leach, D. Phillips, O. Riemer, E. Savio
Publisher	The European Society for Precision Engineering and Nanotechnology
Publication date	2018
Pages	385-386
ISBN (Electronic)	9780995775121
Publication status	Published - 2018
Event	18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18) - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018

Conference

Conference	18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18)
Country	Italy
City	Venice
Period	04/06/2018 → 08/06/2018

Keywords

Micro-Polishing
End Point Detection (EPD)
Monitoring strategies

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Euspen 2018 Venice Proceedings pFinal published version, 815 KB

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Ben Achour, S., Bissacco, G., & De Chiffre, L. (2018). Applicability of Acoustic Emission monitoring to micro polishing. In D. Billington, R. K. Leach, D. Phillips, O. Riemer, & E. Savio (Eds.), Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (pp. 385-386). The European Society for Precision Engineering and Nanotechnology.

Ben Achour, Soufian ; Bissacco, Giuliano ; De Chiffre, L. / Applicability of Acoustic Emission monitoring to micro polishing. Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology. editor / D. Billington ; R. K. Leach ; D. Phillips ; O. Riemer ; E. Savio. The European Society for Precision Engineering and Nanotechnology, 2018. pp. 385-386

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abstract = "Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing. Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.",

keywords = "Micro-Polishing, End Point Detection (EPD), Monitoring strategies",

author = "{Ben Achour}, Soufian and Giuliano Bissacco and {De Chiffre}, L.",

year = "2018",

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booktitle = "Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology",

publisher = "The European Society for Precision Engineering and Nanotechnology",

note = "18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18) ; Conference date: 04-06-2018 Through 08-06-2018",

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Ben Achour, S, Bissacco, G & De Chiffre, L 2018, Applicability of Acoustic Emission monitoring to micro polishing. in D Billington, RK Leach, D Phillips, O Riemer & E Savio (eds), Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology. The European Society for Precision Engineering and Nanotechnology, pp. 385-386, 18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18), Venice, Italy, 04/06/2018.

Applicability of Acoustic Emission monitoring to micro polishing. / Ben Achour, Soufian; Bissacco, Giuliano ; De Chiffre, L.

Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology. ed. / D. Billington; R. K. Leach; D. Phillips; O. Riemer; E. Savio. The European Society for Precision Engineering and Nanotechnology, 2018. p. 385-386.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

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AU - Ben Achour, Soufian

AU - Bissacco, Giuliano

AU - De Chiffre, L.

PY - 2018

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N2 - Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing. Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.

AB - Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing. Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.

KW - Micro-Polishing

KW - End Point Detection (EPD)

KW - Monitoring strategies

M3 - Conference abstract in proceedings

SP - 385

EP - 386

BT - Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology

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A2 - Leach, R. K.

A2 - Phillips, D.

A2 - Riemer, O.

A2 - Savio, E.

PB - The European Society for Precision Engineering and Nanotechnology

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Y2 - 4 June 2018 through 8 June 2018

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Ben Achour S, Bissacco G , De Chiffre L. Applicability of Acoustic Emission monitoring to micro polishing. In Billington D, Leach RK, Phillips D, Riemer O, Savio E, editors, Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology. The European Society for Precision Engineering and Nanotechnology. 2018. p. 385-386