Abstract
An apparatus for carrying out polarization resolved Raman spectroscopy on a sample (11), in particular a crystalline or polycrystalline sample, the apparatus comprises: at least one light source (13, 87, 93, 95, 97), in particular at least one laser, for providing excitation radiation to a surface of the sample (11), an optical system which is configured to simultaneously collect at least one on-axis Raman beam (21, 109) and at least one off-axis Raman beam (23, 111) from Raman light scattered by the sample (11) in response to exposing the surface to the excitation radiation, the at least one on-axis Raman beam (21, 109) being scattered from the sample (11) in a direction that is aligned with an optical axis of an objective (41) of the optical system for collecting the at least one on-axis Raman beam (21, 109), the at least one off-axis Raman beam being scattered from the sample in a direction that is inclined with regard to an optical axis of an objective (41) of the optical system for collecting the at least one off-axis Raman beam (23, 111), the optical system comprises at least one polarizer device (25, 113) for generating at least one polarized on-axis Raman beam (31, 33) from the at least one on-axis Raman beam (21, 109) and at least one polarized off-axis Raman beam (35) from the at least one off-axis Raman beam (23, 111), and the optical system comprises at least one spectrometer (37, 47 81, 83, 85) for generating, in particular simultaneously, an optical spectrum from each of the at least one polarized on-axis Raman beam (31, 33) and the at least one polarized off-axis Raman beam (35).
| Original language | English |
|---|---|
| IPC | G01J 3/ 44 A I |
| Patent number | WO2021110949 |
| Filing date | 04/12/2020 |
| Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
| Priority date | 04/12/2019 |
| Priority number | EP20190213597 |
| Publication status | Published - 10 Jun 2021 |