Annealing effect on the surface morphology of Si(100)

SM Lee, Seunghwan Lee, MM Sung, D Marton, SS Perry, JW Rabalais

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the 11th Int. Conference on Ion Implant Technology 1997
Publication date1997
Pages650-653
Publication statusPublished - 1997
Externally publishedYes
Event11th International Conference on Ion Implant Technology - Austin, TX, United States
Duration: 16 Jun 199621 Jun 1996

Conference

Conference11th International Conference on Ion Implant Technology
CountryUnited States
CityAustin, TX
Period16/06/199621/06/1996

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