Annealing and depostion effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen, Winnie Edith Svendsen, T. Stimpel-Lindner, T. Sulima, H. Baumgärtner, Hugh Philipp

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication date2004
Publication statusPublished - 2004
EventKIF and DFS Annual Meeting - Nyborg, Denmark
Duration: 26 May 200428 May 2004

Conference

ConferenceKIF and DFS Annual Meeting
CountryDenmark
CityNyborg
Period26/05/200428/05/2004

Cite this

Andersen, K. N., Svendsen, W. E., Stimpel-Lindner, T., Sulima, T., Baumgärtner, H., & Philipp, H. (2004). Annealing and depostion effects on the chemical composition of silicon rich nitride. Poster session presented at KIF and DFS Annual Meeting, Nyborg, Denmark.