Annealing and depostion effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen, Winnie Edith Svendsen, T. Stimpel-Lindner, T. Sulima, H. Baumgärtner, Hugh Philipp

Research output: Contribution to conference › Poster › Research

Original language	English
Publication date	2004
Publication status	Published - 2004
Event	KIF and DFS Annual Meeting - Nyborg, Denmark Duration: 26 May 2004 → 28 May 2004

Cite this

@conference{632af81bc22b42b59a2ff314b80195e8,

title = "Annealing and depostion effects on the chemical composition of silicon rich nitride",

author = "Andersen, {Karin Nordstr{\"o}m} and Svendsen, {Winnie Edith} and T. Stimpel-Lindner and T. Sulima and H. Baumg{\"a}rtner and Hugh Philipp",

year = "2004",

language = "English",

note = "KIF and DFS Annual Meeting ; Conference date: 26-05-2004 Through 28-05-2004",

}