Annealing and deposition effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen; Winnie Edith Svendsen; T. Stimpel-Lindner; T. Sulima; H. Baumgärtner; H. Philipp

Annealing and deposition effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen
, Winnie Edith Svendsen
, T. Stimpel-Lindner
, T. Sulima
, H. Baumgärtner
, H. Philipp

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of KIF and DFS annual meeting
Publication date	2004
Publication status	Published - 2004

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@inproceedings{5ab543c6214949cea1d412787fca20d8,

title = "Annealing and deposition effects on the chemical composition of silicon rich nitride",

author = "Andersen, \{Karin Nordstr{\"o}m\} and Svendsen, \{Winnie Edith\} and T. Stimpel-Lindner and T. Sulima and H. Baumg{\"a}rtner and H. Philipp",

year = "2004",

language = "English",

booktitle = "Proceedings of KIF and DFS annual meeting",

}