Annealing and deposition effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen, Winnie Edith Svendsen, T. Stimpel-Lindner, T. Sulima, H. Baumgärtner, H. Philipp

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of KIF and DFS annual meeting
    Publication date2004
    Publication statusPublished - 2004

    Cite this

    Andersen, K. N., Svendsen, W. E., Stimpel-Lindner, T., Sulima, T., Baumgärtner, H., & Philipp, H. (2004). Annealing and deposition effects on the chemical composition of silicon rich nitride. In Proceedings of KIF and DFS annual meeting