Annealing and deposition effects on the chemical composition of silicon rich nitride

Karin Nordström Andersen, Winnie Edith Svendsen, T. Stimpel-Lindner, T. Sulima, H. Baumgärtner, H. Philipp

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of KIF and DFS annual meeting
    Publication date2004
    Publication statusPublished - 2004

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