Annealing and deposition effects of the chemical composition of silicon rich nitride

Karin Nordström Andersen, Winnie Edith Svendsen, T. Stimpel-Lindner, T. Sulima, H. Baumgärtner

    Research output: Contribution to journal › Journal article › Research › peer-review

    Fingerprint

    Dive into the research topics of 'Annealing and deposition effects of the chemical composition of silicon rich nitride'. Together they form a unique fingerprint.

    Keyphrases

    Material Science

    Engineering