Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

Christian Carstensen Hindrichsen; Ninia Sejersen Almind; S. H. Brodersen; Ole Hansen; Erik Vilain Thomsen

doi:10.1109/JSEN.2009.2014412

Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

Christian Carstensen Hindrichsen, Ninia Sejersen Almind, S. H. Brodersen, Ole Hansen, Erik Vilain Thomsen

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Abstract

We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stress contributions are ignored. The model results in design equations that are useful for optimization of the sensitivity and bandwidth and for matching the sensitivity in the three orthogonal directions. A finite-element method (FEM) model is used to verify the analytical model. Equal sensitivity in all three geometrical directions is preferred, which induces a number of limitations in design parameter space, this is used in a design strategy for setting the six independent dimensions of the accelerometer. Design methods for optimum sensitivity of each axis and for equal sensitivity between different axes have been proposed.

Original language	English
Journal	IEEE Sensors Journal
Volume	9
Issue number	4
Pages (from-to)	419-429
ISSN	1530-437X
DOIs	https://doi.org/10.1109/JSEN.2009.2014412
Publication status	Published - 2009

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Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Keywords

analytical model
Accelerometer
thick-film
triaxial
PZT

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title = "Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design",

abstract = "We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stress contributions are ignored. The model results in design equations that are useful for optimization of the sensitivity and bandwidth and for matching the sensitivity in the three orthogonal directions. A finite-element method (FEM) model is used to verify the analytical model. Equal sensitivity in all three geometrical directions is preferred, which induces a number of limitations in design parameter space, this is used in a design strategy for setting the six independent dimensions of the accelerometer. Design methods for optimum sensitivity of each axis and for equal sensitivity between different axes have been proposed.",

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note = "Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE",

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AU - Hindrichsen, Christian Carstensen

AU - Almind, Ninia Sejersen

AU - Brodersen, S. H.

AU - Hansen, Ole

AU - Thomsen, Erik Vilain

N1 - Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2009

Y1 - 2009

N2 - We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stress contributions are ignored. The model results in design equations that are useful for optimization of the sensitivity and bandwidth and for matching the sensitivity in the three orthogonal directions. A finite-element method (FEM) model is used to verify the analytical model. Equal sensitivity in all three geometrical directions is preferred, which induces a number of limitations in design parameter space, this is used in a design strategy for setting the six independent dimensions of the accelerometer. Design methods for optimum sensitivity of each axis and for equal sensitivity between different axes have been proposed.

AB - We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stress contributions are ignored. The model results in design equations that are useful for optimization of the sensitivity and bandwidth and for matching the sensitivity in the three orthogonal directions. A finite-element method (FEM) model is used to verify the analytical model. Equal sensitivity in all three geometrical directions is preferred, which induces a number of limitations in design parameter space, this is used in a design strategy for setting the six independent dimensions of the accelerometer. Design methods for optimum sensitivity of each axis and for equal sensitivity between different axes have been proposed.

KW - analytical model

KW - Accelerometer

KW - thick-film

KW - triaxial

KW - PZT

U2 - 10.1109/JSEN.2009.2014412

DO - 10.1109/JSEN.2009.2014412

M3 - Journal article

SN - 1530-437X

VL - 9

SP - 419

EP - 429

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 4

ER -

Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

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